Oxide CMP steps in the integration of vertical Si nanowire tunnelFET devices

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Authors
Devriendt, Katia; Ong, Patrick; Lee, Willie; Rooyackers, Rita; Vandooren, Anne; De Gendt, Stefan; Leunissen, Peter
Conference
International Conference on Planarization Technology - ICPT
Title
Oxide CMP steps in the integration of vertical Si nanowire tunnelFET devices
Publication type
Proceedings paper
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