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MEMS technology trends

dc.contributor.authorDonnay, Stephane
dc.date.accessioned2021-10-18T16:05:23Z
dc.date.available2021-10-18T16:05:23Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17034
dc.sourceIIOimport
dc.titleMEMS technology trends
dc.typeOral presentation
dc.contributor.imecauthorDonnay, Stephane
dc.contributor.orcidimecDonnay, Stephane::0000-0003-2489-4793
dc.source.peerreviewno
dc.source.conferenceUK MEMS Special Interest Group Workshop
dc.source.conferencedate15/09/2010
dc.source.conferencelocationLondon UK
imec.availabilityPublished - imec
imec.internalnotesworkshop attendance by invitiation only - presentations only available to participants


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