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DIBL behavior of triple gate FinFETs with SEG on biaxial strained devices
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Authors
Dos Santos, S.D.
;
Nicoletti, Talitha
;
Martino, J.A.
;
Simoen, Eddy
;
Claeys, Cor
Conference
Microelectronics Technology and Devices - SBMICRO 2010
Title
DIBL behavior of triple gate FinFETs with SEG on biaxial strained devices
Publication type
Proceedings paper
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