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Foundry processes for silicon photonics

dc.contributor.authorDumon, Pieter
dc.date.accessioned2021-10-18T16:07:44Z
dc.date.available2021-10-18T16:07:44Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17045
dc.sourceIIOimport
dc.titleFoundry processes for silicon photonics
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.conference15th European Conference on Integrated Optics - ECIO
dc.source.conferencedate6/04/2010
dc.source.conferencelocationCambridge UK
imec.availabilityPublished - imec
imec.internalnotespaper WeG3


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