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Evaluation of photosensitive spin-on-dielectrics for 3-D wafer level packaging

dc.contributor.authorDuval, Fabrice
dc.contributor.authorMiller, Andy
dc.contributor.authorSoussan, Philippe
dc.date.accessioned2021-10-18T16:08:36Z
dc.date.available2021-10-18T16:08:36Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17049
dc.sourceIIOimport
dc.titleEvaluation of photosensitive spin-on-dielectrics for 3-D wafer level packaging
dc.typeMeeting abstract
dc.contributor.imecauthorDuval, Fabrice
dc.contributor.imecauthorMiller, Andy
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.source.peerreviewno
dc.source.conference14th Symposium on Polymers for Microelectronics
dc.source.conferencedate11/05/2010
dc.source.conferencelocationWilmington, DE USA
imec.availabilityPublished - imec


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