Authors

Badenes, Gonçal; Losantos, P.; Cane, C.; Lora-Tamayo, E.

Conference

CDE-97 : Actas de la 1a Conferencia de Dispositivos Electrónicos (EDC - Proceedings of the Electronic Devices Conference); 20-21

Title

Determination of the film thickness of SIMOX substrates using simple calibration curves

Publication type

Proceedings paper