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Articles
A water-tight packaging of MEMS electrostatic actuators for biomedical applications
Publication:
A water-tight packaging of MEMS electrostatic actuators for biomedical applications
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Erismis, Mehmet Akif
;
Pereira Neves, Hercules
;
De Moor, Piet
;
Puers, Bob
;
Van Hoof, Chris
Journal
Microsystem Technologies
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1921
since deposited on 2021-10-18
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Acq. date: 2025-12-10
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Metrics
Views
1921
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-10
Citations