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A water-tight packaging of MEMS electrostatic actuators for biomedical applications

dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorDe Moor, Piet
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-18T16:16:13Z
dc.date.available2021-10-18T16:16:13Z
dc.date.issued2010
dc.identifier.issn0946-7076
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17082
dc.sourceIIOimport
dc.titleA water-tight packaging of MEMS electrostatic actuators for biomedical applications
dc.typeJournal article
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewyes
dc.source.beginpage2109
dc.source.endpage2113
dc.source.journalMicrosystem Technologies
dc.source.issue12
dc.source.volume16
imec.availabilityPublished - imec


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