Authors

Everaert, Jean-Luc; Rosseel, Erik; Meszaros, Albert; Kis-Szabo, Krisztian; Tutto, P; Pap, Aron; Pavelka, Tibor; Wilson, Marshall; Findlay, Andrew; Edelman, P.; Lagowski, Jacek

Conference

Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-based CMOS 6: New Materials, Processes, and Equipment

Title

Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance

Publication type

Proceedings paper