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Development and optimization of FIB-based sample preparation for SSRM
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Authors
Eyben, Pierre
;
Mody, Jay
;
Nazir, Aftab
;
Schulze, Andreas
;
Hantschel, Thomas
;
Vandervorst, Wilfried
Conference
E-MRS Fall Symposium D: Multidimensional electrical and chemical characterization at the nanometer-scale of organic ...
Title
Development and optimization of FIB-based sample preparation for SSRM
Publication type
Oral presentation
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