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Strain in PFETs analyzed by nano beam diffraction

dc.contributor.authorFavia, Paola
dc.contributor.authorEneman, Geert
dc.contributor.authorYamaguchi, Shinpei
dc.contributor.authorOrtolland, Claude
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-18T16:19:35Z
dc.date.available2021-10-18T16:19:35Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17096
dc.sourceIIOimport
dc.titleStrain in PFETs analyzed by nano beam diffraction
dc.typeProceedings paper
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewyes
dc.source.conferenceInternational Microscopy Congress - IMC-17
dc.source.conferencedate19/09/2010
dc.source.conferencelocationRio de Janeiro Brazil
imec.availabilityPublished - imec


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