Scaling the suspended gate FET: impact of dielectric charging and roughness

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Authors
Garcia Bardon, Marie; Pereira Neves, Hercules; Puers, Bob; Van Hoof, Chris
ISSN
0018-9383
Issue
4
Journal
IEEE Transactions on Electron Devices
Volume
57
Title
Scaling the suspended gate FET: impact of dielectric charging and roughness
Publication type
Journal article
Embargo date
9999-12-31
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