dc.contributor.author | Gielis, Sven | |
dc.contributor.author | van der Veen, Marleen | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Vereecken, Philippe | |
dc.date.accessioned | 2021-10-18T16:33:08Z | |
dc.date.available | 2021-10-18T16:33:08Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17148 | |
dc.source | IIOimport | |
dc.title | Silver-assisted electroless etching of Si nanowires | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | van der Veen, Marleen | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Vereecken, Philippe | |
dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Vereecken, Philippe::0000-0003-4115-0075 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1971 | |
dc.source.conference | 218th ECS Meeting Symposium 'Electroless Deposition Principles, Activation, and Applications' | |
dc.source.conferencedate | 10/10/2010 | |
dc.source.conferencelocation | Las Vegas, NV USA | |
dc.identifier.url | http://ecsmeet3.peerx-press.org/jsp/mas/reportTechProg.jsp?MEETING_ID=101&SYM_ID=142#abs1971 | |
imec.availability | Published - open access | |
imec.internalnotes | Meeting Abstracts; Vol. 2010-02 | |