Publication:

EUV resist material performance, progress and process improvements at imec

Date

2010

Proceedings Paper

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Files

20879.pdf 6.48 MB

Author(s)

Goethals, Mieke

;

Niroomand, Ardavan

;

;

Hosokawa, Kohei

;

Van Roey, Frieda

;

Pollentier, Ivan

;

Jehoul, Christiane

;

Van Den Heuvel, Dieter

;

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