Publication:

EUV resist material performance, progress and process improvements at imec

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

20879.pdf 6.48 MB

Author(s)

Goethals, Mieke
;
Niroomand, Ardavan
;
Ban, Keundo
;
Hosokawa, Kohei
;
Van Roey, Frieda  
;
Pollentier, Ivan  
;
Jehoul, Christiane  
;
Van Den Heuvel, Dieter  
;
Ronse, Kurt  

Journal

Abstract

Description

Statistics

Downloads

1 since deposited on 2021-10-18
Acq. date: 2026-07-19

Views

2070 since deposited on 2021-10-18
2last month
Acq. date: 2026-07-19

Citations

Statistics

Downloads

1 since deposited on 2021-10-18
Acq. date: 2026-07-19

Views

2070 since deposited on 2021-10-18
2last month
Acq. date: 2026-07-19

Citations