Publication:

EUV resist material performance, progress and process improvements at imec

Date

2010
Proceedings Paper
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Author(s)

Goethals, Mieke
;
Niroomand, Ardavan
;
Ban, Keundo
;
Hosokawa, Kohei
;
Van Roey, Frieda  
;
Pollentier, Ivan  
;
Jehoul, Christiane  
;
Van Den Heuvel, Dieter  
;
Ronse, Kurt  

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