Authors

Gong, Chun; Simoen, Eddy; Posthuma, Niels; Van Kerschaver, Emmanuel; Poortmans, Jef; Mertens, Robert

ISSN

0022-3727

Issue

48

Journal

Journal of Physics D: Applied Physics

Volume

43

Title

Study of silicon-silicon nitride interface properties on planar (100), planar (111) and textured surfaces using deep-level transient spectroscopy

Publication type

Journal article