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Study of silicon-silicon nitride interface properties on planar (100), planar (111) and textured surfaces using deep-level transient spectroscopy

dc.contributor.authorGong, Chun
dc.contributor.authorSimoen, Eddy
dc.contributor.authorPosthuma, Niels
dc.contributor.authorVan Kerschaver, Emmanuel
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-18T16:36:10Z
dc.date.available2021-10-18T16:36:10Z
dc.date.issued2010
dc.identifier.issn0022-3727
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17160
dc.sourceIIOimport
dc.titleStudy of silicon-silicon nitride interface properties on planar (100), planar (111) and textured surfaces using deep-level transient spectroscopy
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorPosthuma, Niels
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecPosthuma, Niels::0000-0002-6029-1909
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewyes
dc.source.beginpage485301
dc.source.journalJournal of Physics D: Applied Physics
dc.source.issue48
dc.source.volume43
dc.identifier.urlhttp://iopscience.iop.org/0022-3727/43/48/485301/pdf/0022-3727_43_48_485301.pdf
imec.availabilityPublished - imec


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