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Study of silicon-silicon nitride interface properties on flat and textured surfaces by deep level transient spectroscopy

dc.contributor.authorGong, Chun
dc.contributor.authorSimoen, Eddy
dc.contributor.authorZhao, Lu
dc.contributor.authorPosthuma, Niels
dc.contributor.authorVan Kerschaver, Emmanuel
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-18T16:36:26Z
dc.date.available2021-10-18T16:36:26Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17161
dc.sourceIIOimport
dc.titleStudy of silicon-silicon nitride interface properties on flat and textured surfaces by deep level transient spectroscopy
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorPosthuma, Niels
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecPosthuma, Niels::0000-0002-6029-1909
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage858
dc.source.endpage862
dc.source.conference35th IEEE Photovoltaic Specialists Conference - PVSC
dc.source.conferencedate20/06/2010
dc.source.conferencelocationHonolulu, HI USA
imec.availabilityPublished - open access


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