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Optimization of the piezoresistive and electrical properties of polycrystalline silicon-germanium for MEMS sensor applications

dc.contributor.authorGonzalez, Pilar
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-18T16:37:47Z
dc.date.available2021-10-18T16:37:47Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17166
dc.sourceIIOimport
dc.titleOptimization of the piezoresistive and electrical properties of polycrystalline silicon-germanium for MEMS sensor applications
dc.typeProceedings paper
dc.contributor.imecauthorGonzalez, Pilar
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Meyer, Kristin
dc.source.peerreviewno
dc.source.beginpage580
dc.source.endpage583
dc.source.conference23rd IEEE International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate24/01/2010
dc.source.conferencelocationHong Kong China
imec.availabilityPublished - imec


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