dc.contributor.author | Gonzalez, Pilar | |
dc.contributor.author | Haspeslagh, Luc | |
dc.contributor.author | Severi, Simone | |
dc.contributor.author | De Meyer, Kristin | |
dc.contributor.author | Witvrouw, Ann | |
dc.date.accessioned | 2021-10-18T16:38:02Z | |
dc.date.available | 2021-10-18T16:38:02Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17167 | |
dc.source | IIOimport | |
dc.title | Piezoresistivity and electrical properties of poly-SiGe deposited at CMOS-compatible temperatures | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Gonzalez, Pilar | |
dc.contributor.imecauthor | Haspeslagh, Luc | |
dc.contributor.imecauthor | Severi, Simone | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.source.peerreview | yes | |
dc.source.beginpage | 476 | |
dc.source.endpage | 479 | |
dc.source.conference | 40th European Solid-State Device Research Conference - ESSDERC | |
dc.source.conferencedate | 13/09/2010 | |
dc.source.conferencelocation | Sevilla Spain | |
imec.availability | Published - imec | |