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Anodic dissolution for etching large length-to-height ratio microfluidic channels

dc.contributor.authorGonzalo Ruiz, Javier
dc.contributor.authorPatrascu, Mihai
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorCrego Calama, Mercedes
dc.date.accessioned2021-10-18T16:38:17Z
dc.date.available2021-10-18T16:38:17Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17168
dc.sourceIIOimport
dc.titleAnodic dissolution for etching large length-to-height ratio microfluidic channels
dc.typeProceedings paper
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference12th International Conference on New Actuators and 6th International Exhibition on Smart Actuators and Drive Systems - ACTUATOR
dc.source.conferencedate14/06/2010
dc.source.conferencelocationBremen Germany
imec.availabilityPublished - open access


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