EUV RLS performance tradeoffs for a polymer bound PAG resist

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Authors
Gronheid, Roel; Vaglio Pret, Alessandro; Rathsack, Benjamin; Hooge, Joshua; Scheer, Steven; Nafus, Kathleen; Shite, Hideo; Kitano, Junichi
Conference
Advances in Resist Materials and Processing Technology XXVII
Title
EUV RLS performance tradeoffs for a polymer bound PAG resist
Publication type
Proceedings paper
Embargo date
9999-12-31
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