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An optical force measurement system with microfabricated mirror probes and in-plane tips for semiconductor device characterization

dc.contributor.authorHantschel, Thomas
dc.contributor.authorArstila, Kai
dc.date.accessioned2021-10-18T16:51:49Z
dc.date.available2021-10-18T16:51:49Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17218
dc.sourceIIOimport
dc.titleAn optical force measurement system with microfabricated mirror probes and in-plane tips for semiconductor device characterization
dc.typeMeeting abstract
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conference2nd Kleindiek User Meeting
dc.source.conferencedate14/03/2010
dc.source.conferencelocationKusterdingen Germany
imec.availabilityPublished - imec


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