dc.contributor.author | Hardy, An | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Van Bael, Marlies | |
dc.date.accessioned | 2021-10-18T16:53:23Z | |
dc.date.available | 2021-10-18T16:53:23Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17224 | |
dc.source | IIOimport | |
dc.title | Preparation and properties of ultrathin high-k dielectric films by aqueous chemical solution deposition | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Hardy, An | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Van Bael, Marlies | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Van Bael, Marlies::0000-0002-5516-7962 | |
dc.source.peerreview | no | |
dc.source.conference | Intern. Symp. on the Applications of Ferroelectrics - European Conf. on the Applications of Polar Dielectrics - ISAF-ECAPD | |
dc.source.conferencedate | 9/08/2010 | |
dc.source.conferencelocation | Edinburgh UK | |
imec.availability | Published - imec | |