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Systematic study of shallow junction formation on Germanium substrates

dc.contributor.authorHellings, Geert
dc.contributor.authorRosseel, Erik
dc.contributor.authorClarysse, Trudo
dc.contributor.authorPetersen, Dirch Hjorth
dc.contributor.authorHansen, Ole
dc.contributor.authorNielsen, Peter Folmer
dc.contributor.authorSimoen, Eddy
dc.contributor.authorEneman, Geert
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T16:59:31Z
dc.date.available2021-10-18T16:59:31Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17245
dc.sourceIIOimport
dc.titleSystematic study of shallow junction formation on Germanium substrates
dc.typeMeeting abstract
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.source.peerreviewyes
dc.source.conferenceE-MRS Spring Meeting Symposium H: Post-Si CMOS Electronic Devices: The Role of Ge and III-V Materials
dc.source.conferencedate7/06/2010
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


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