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Large-area remote plasma deposition of oxides and nitrides

dc.contributor.authorBeaucarne, Guy
dc.contributor.authorSaid, Khalid
dc.contributor.authorVermeulen, Tom
dc.contributor.authorDuerinckx, Filip
dc.contributor.authorPoortmans, Jef
dc.contributor.authorNijs, Johan
dc.date.accessioned2021-09-30T07:56:03Z
dc.date.available2021-09-30T07:56:03Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1724
dc.sourceIIOimport
dc.titleLarge-area remote plasma deposition of oxides and nitrides
dc.typeProceedings paper
dc.contributor.imecauthorDuerinckx, Filip
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecDuerinckx, Filip::0000-0003-2570-7371
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1770
dc.source.endpage1773
dc.source.conference14th European Photovoltaic Solar Energy Conference and Exhibition. Proceedings of the International Conference
dc.source.conferencedate30/06/1997
dc.source.conferencelocationBarcelona Spain
imec.availabilityPublished - open access


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