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Exploratory materials and devices to advance CMOS beyond the classical Si roadmap

dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-18T17:03:44Z
dc.date.available2021-10-18T17:03:44Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17259
dc.sourceIIOimport
dc.titleExploratory materials and devices to advance CMOS beyond the classical Si roadmap
dc.typeMeeting abstract
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.conference10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
dc.source.conferencedate19/09/2010
dc.source.conferencelocationOostende Belgium
imec.availabilityPublished - imec


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