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Shaping the future of nanoelectronics beyond the Si roadmap with new materials and devices

dc.contributor.authorHeyns, Marc
dc.contributor.authorBellenger, Florence
dc.contributor.authorBrammertz, Guy
dc.contributor.authorCaymax, Matty
dc.contributor.authorCantoro, Mirco
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorDelabie, Annelies
dc.contributor.authorEneman, Geert
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHellings, Geert
dc.contributor.authorHoussa, Michel
dc.contributor.authorIacopi, Francesca
dc.contributor.authorLeonelli, Daniele
dc.contributor.authorLin, Dennis
dc.contributor.authorMagnus, Wim
dc.contributor.authorMartens, Koen
dc.contributor.authorMerckling, Clement
dc.contributor.authorMeuris, Marc
dc.contributor.authorMitard, Jerome
dc.contributor.authorPenaud, Julien
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorScarrozza, Marco
dc.contributor.authorSimoen, Eddy
dc.contributor.authorSoree, Bart
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVandenberghe, William
dc.contributor.authorVandooren, Anne
dc.contributor.authorVereecken, Philippe
dc.contributor.authorVerhulst, Anne
dc.contributor.authorWang, Wei-E
dc.date.accessioned2021-10-18T17:04:30Z
dc.date.available2021-10-18T17:04:30Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17261
dc.sourceIIOimport
dc.titleShaping the future of nanoelectronics beyond the Si roadmap with new materials and devices
dc.typeProceedings paper
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorLeonelli, Daniele
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorMagnus, Wim
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorSoree, Bart
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecSoree, Bart::0000-0002-4157-1956
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.source.peerreviewno
dc.source.beginpage764003
dc.source.conferenceOptical Microlithography XXIII
dc.source.conferencedate21/02/2010
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec
imec.internalnotesSPIE Proceedings; Vol. 7640


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