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Perspectives on opportunities & challenges of multi-gate non-planar device architectures for 22nm node & beyond

dc.contributor.authorHoffmann, Thomas Y.
dc.date.accessioned2021-10-18T17:06:19Z
dc.date.available2021-10-18T17:06:19Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17267
dc.sourceIIOimport
dc.titlePerspectives on opportunities & challenges of multi-gate non-planar device architectures for 22nm node & beyond
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceSeminar @ Varian Semiconductors
dc.source.conferencedate31/03/2010
dc.source.conferencelocationGloucester, MA USA
imec.availabilityPublished - imec


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