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Ion channeling strain measurements of uniaxially strained Si/SiGe heterostructures on Si(110) and Si(110)
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Authors
Hollaender, Bernd
;
Minamisawa, R.
;
Buca, Dan
;
Trinkaus, H
;
Mantl, Siegfried
;
Loo, Roger
;
Hartmann, Jean-Michel
Conference
17th International Conference on Ion Beam Modification of Materials - IBMM
Title
Ion channeling strain measurements of uniaxially strained Si/SiGe heterostructures on Si(110) and Si(110)
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