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FIB preparation of cross-sectional transmission electron microscopy specimens of unpassivated device structures

dc.contributor.authorBender, Hugo
dc.contributor.authorVan Marcke, Pieter
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorRoussel, Philippe
dc.date.accessioned2021-09-30T07:56:18Z
dc.date.available2021-09-30T07:56:18Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1728
dc.sourceIIOimport
dc.titleFIB preparation of cross-sectional transmission electron microscopy specimens of unpassivated device structures
dc.typeOral presentation
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorRoussel, Philippe
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference1st FIB User Group Meeting
dc.source.conferencedate6/10/1997
dc.source.conferencelocationArcachon France
imec.availabilityPublished - open access


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