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Alternative patterning techniques enabling fine pitch interconnection on topography surfaces

dc.contributor.authorIker, Francois
dc.contributor.authorFunaya, Takuo
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-18T17:17:40Z
dc.date.available2021-10-18T17:17:40Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17303
dc.sourceIIOimport
dc.titleAlternative patterning techniques enabling fine pitch interconnection on topography surfaces
dc.typeProceedings paper
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewyes
dc.source.beginpage431
dc.source.endpage434
dc.source.conferenceIEEE 60th Electronic Components and Technology Conference - ECTC
dc.source.conferencedate1/06/2010
dc.source.conferencelocationLas Vegas, NV USA
imec.availabilityPublished - imec


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