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A descum review for cleaning surfaces in polymer embedded process flows

dc.contributor.authorJamieson, Geraldine
dc.contributor.authorIker, Francois
dc.contributor.authorTakeshi, Kita
dc.contributor.authorDuval, Fabrice
dc.contributor.authorPham, Nga
dc.contributor.authorGerets, Carine
dc.contributor.authorBoullart, Werner
dc.contributor.authorFunaya, T.
dc.date.accessioned2021-10-18T17:20:15Z
dc.date.available2021-10-18T17:20:15Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17311
dc.sourceIIOimport
dc.titleA descum review for cleaning surfaces in polymer embedded process flows
dc.typeMeeting abstract
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorDuval, Fabrice
dc.contributor.imecauthorPham, Nga
dc.contributor.imecauthorGerets, Carine
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.source.peerreviewno
dc.source.beginpage54
dc.source.endpage55
dc.source.conference10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS
dc.source.conferencedate19/09/2010
dc.source.conferencelocationOostende Belgium
imec.availabilityPublished - imec


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