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Boron-doped nanocrystalline diamond films deposited under variable methane/hydrogen ratios

dc.contributor.authorJanssens, S.D.
dc.contributor.authorHaenen, Ken
dc.contributor.authorWagner, Patrick
dc.date.accessioned2021-10-18T17:22:22Z
dc.date.available2021-10-18T17:22:22Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17318
dc.sourceIIOimport
dc.titleBoron-doped nanocrystalline diamond films deposited under variable methane/hydrogen ratios
dc.typeMeeting abstract
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conference4th International Conferenceon New Diamond and Nano Carbons - NDNC
dc.source.conferencedate16/05/2010
dc.source.conferencelocationSuzhou China
imec.availabilityPublished - imec


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