Impact and mitigation of EUV reticle contamination

dc.contributor.author	Jonckheere, Rik
dc.date.accessioned	2021-10-18T17:24:25Z
dc.date.available	2021-10-18T17:24:25Z
dc.date.issued	2010
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/17325
dc.source	IIOimport
dc.title	Impact and mitigation of EUV reticle contamination
dc.type	Oral presentation
dc.contributor.imecauthor	Jonckheere, Rik
dc.contributor.orcidimec	Jonckheere, Rik::0000-0003-2211-9443
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.conference	SPAM Project - Open Conference on Contamination/Decontamination
dc.source.conferencedate	13/09/2010
dc.source.conferencelocation	Annecy France
imec.availability	Published - open access