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Atom probe for FinFET dopant characterization

dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorMody, Jay
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T17:30:24Z
dc.date.available2021-10-18T17:30:24Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17345
dc.sourceIIOimport
dc.titleAtom probe for FinFET dopant characterization
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference52nd International Field Emission Symposium - IFES
dc.source.conferencedate5/07/2010
dc.source.conferencelocationSydney Australia
imec.availabilityPublished - open access


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