From 2D to 3D: FIB sample preparation for carbon nanotube interconnects

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Authors
Ke, Xiaoxing; Bals, Sarah; Romo Negreira, Ainhoa; Cott, Daire; Hantschel, Thomas; Bender, Hugo; Van Tendeloo, Gustaaf
Conference
17th International Microscopy Congress
Title
From 2D to 3D: FIB sample preparation for carbon nanotube interconnects
Publication type
Proceedings paper
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