Insight of chemical mechanical cleaning and its future
dc.contributor.author | Kim, Tae-Gon | |
dc.date.accessioned | 2021-10-18T17:39:35Z | |
dc.date.available | 2021-10-18T17:39:35Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17374 | |
dc.source | IIOimport | |
dc.title | Insight of chemical mechanical cleaning and its future | |
dc.type | Meeting abstract | |
dc.source.peerreview | no | |
dc.source.conference | The 7th International Surface Cleaning Workshop | |
dc.source.conferencedate | 28/10/2010 | |
dc.source.conferencelocation | Boston, MA USA | |
imec.availability | Published - imec |
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