Authors

Kim, Tae-Gon; Le, Quoc Toan; Suhard, Samuel; Lux, Marcel; Vereecke, Guy; Claes, Martine; Struyf, Herbert; De Gendt, Stefan; Mertens, Paul; Heyns, Marc

Conference

10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS

Title

Characterization of low-k dielectric etch residue on the sidewall by chemical force microscope

Publication type

Meeting abstract

Embargo date

9999-12-31