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Proton-induced mobility degradation in FinFETs with stressor layers and strained SOI substrates
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Authors
Kobayashi, Daisuke
;
Simoen, Eddy
;
Put, Sofie
;
Griffoni, Alessio
;
Poizat, Marc
;
Hirose, Kazuyuki
;
Claeys, Cor
Conference
11th European Conference on Radiation and its Effects on Components and Systems - RADECS
Title
Proton-induced mobility degradation in FinFETs with stressor layers and strained SOI substrates
Publication type
Proceedings paper
Embargo date
9999-12-31
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