Effect of energetic ions on plasma damage of SiCOH low-k material

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Authors

Kunnen, Eddy; Baklanov, Mikhaïl; Franquet, Alexis; Shamiryan, Denis; Rakhimova, Tatyana; Urbanowicz, Adam; Struyf, Herbert; Boullart, Werner

ISSN

1071-1023

Issue

3

Journal

Journal of Vacuum Science and Technology B

Volume

28

Title

Effect of energetic ions on plasma damage of SiCOH low-k material

Publication type

Journal article

Embargo date

9999-12-31

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