Show simple item record

Effect of top power on a low-k film during oxygen strip in a TCP chamber

dc.contributor.authorKunnen, Eddy
dc.contributor.authorRakhimova, Tatyana
dc.contributor.authorShamiryan, Denis
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBoullart, Werner
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-18T17:50:59Z
dc.date.available2021-10-18T17:50:59Z
dc.date.issued2010
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17409
dc.sourceIIOimport
dc.titleEffect of top power on a low-k film during oxygen strip in a TCP chamber
dc.typeJournal article
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.source.peerreviewyes
dc.source.beginpage462
dc.source.endpage465
dc.source.journalMicroelectronic Engineering
dc.source.issue3
dc.source.volume87
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record