Effect of top power on a low-k film during oxygen strip in a TCP chamber

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Authors

Kunnen, Eddy; Rakhimova, Tatyana; Shamiryan, Denis; Struyf, Herbert; Boullart, Werner; Baklanov, Mikhaïl

ISSN

0167-9317

Issue

3

Journal

Microelectronic Engineering

Volume

87

Title

Effect of top power on a low-k film during oxygen strip in a TCP chamber

Publication type

Journal article

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