Publication:
Effect of top power on a low-k film during oxygen strip in a TCP chamber
Date
| dc.contributor.author | Kunnen, Eddy | |
| dc.contributor.author | Rakhimova, Tatyana | |
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Struyf, Herbert | |
| dc.contributor.author | Boullart, Werner | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | Struyf, Herbert | |
| dc.contributor.imecauthor | Boullart, Werner | |
| dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
| dc.date.accessioned | 2021-10-18T17:50:59Z | |
| dc.date.available | 2021-10-18T17:50:59Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 0167-9317 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17409 | |
| dc.source.beginpage | 462 | |
| dc.source.endpage | 465 | |
| dc.source.issue | 3 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 87 | |
| dc.title | Effect of top power on a low-k film during oxygen strip in a TCP chamber | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |