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Thermal oxidation of a densely packed array of vertical Si nanowires

dc.contributor.authorKurstjens, Rufi
dc.contributor.authorDross, Frederic
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-18T17:52:22Z
dc.date.available2021-10-18T17:52:22Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17413
dc.sourceIIOimport
dc.titleThermal oxidation of a densely packed array of vertical Si nanowires
dc.typeOral presentation
dc.contributor.imecauthorKurstjens, Rufi
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewno
dc.source.conferenceSPIE Optics and Photonics Conference
dc.source.conferencedate1/08/2010
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - imec


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