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Wafer-level hermetic packaging for bio-medical applications

dc.contributor.authorLa Manna, Antonio
dc.date.accessioned2021-10-18T17:54:35Z
dc.date.available2021-10-18T17:54:35Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17420
dc.sourceIIOimport
dc.titleWafer-level hermetic packaging for bio-medical applications
dc.typeProceedings paper
dc.contributor.imecauthorLa Manna, Antonio
dc.source.peerreviewno
dc.source.conferenceIMAPS 43rd International Symposium on Microelectronics
dc.source.conferencedate31/10/2010
dc.source.conferencelocationRaleigh, NC USA
imec.availabilityPublished - imec


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