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Investigation of the passivation properties of PECVD-silicon-nitride layers on silicon solar cells

dc.contributor.authorBitnar, B.
dc.contributor.authorGlatthaar, R.
dc.contributor.authorKeller, S.
dc.contributor.authorKugler, J.
dc.contributor.authorSpiegel, M.
dc.contributor.authorFath, Peter
dc.contributor.authorWilleke, Gerhard
dc.contributor.authorBucher, E.
dc.contributor.authorDuerinckx, Filip
dc.contributor.authorSzlufcik, Jozef
dc.contributor.authorNijs, Johan
dc.contributor.authorMertens, Robert
dc.contributor.authorNussbaumer, H.
dc.contributor.authorFerrazza, F.
dc.date.accessioned2021-09-30T07:57:25Z
dc.date.available2021-09-30T07:57:25Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1742
dc.sourceIIOimport
dc.titleInvestigation of the passivation properties of PECVD-silicon-nitride layers on silicon solar cells
dc.typeProceedings paper
dc.contributor.imecauthorDuerinckx, Filip
dc.contributor.imecauthorSzlufcik, Jozef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecDuerinckx, Filip::0000-0003-2570-7371
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1491
dc.source.endpage1494
dc.source.conference14th European Photovoltaic Solar Energy Conference and Exhibition. Proceedings of the International Conference
dc.source.conferencedate30/06/1997
dc.source.conferencelocationBarcelona Spain
imec.availabilityPublished - open access


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