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Electret patterning technologies for microsystems

dc.contributor.authorLeonov, Vladimir
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorAltena, Geert
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-18T18:12:10Z
dc.date.available2021-10-18T18:12:10Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17476
dc.sourceIIOimport
dc.titleElectret patterning technologies for microsystems
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewno
dc.source.beginpage35
dc.source.conferenceSmart Systems Integration: 4th European Conference on Integration Issues of Miniaturized Systems
dc.source.conferencedate23/03/2010
dc.source.conferencelocationComo Italy
imec.availabilityPublished - imec


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