High quality Ge virtual substrates on Si wafers with standard STI patterning

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Authors

Loo, Roger; Wang, Gang; Souriau, Laurent; Lin, Vic; Takeuchi, Shotaro; Brammertz, Guy; Caymax, Matty

ISSN

0013-4651

Issue

1

Journal

Journal of the Electrochemical Society

Volume

157

Title

High quality Ge virtual substrates on Si wafers with standard STI patterning

Publication type

Journal article

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