Show simple item record

High quality Ge virtual substrates on Si wafers with standard STI patterning

dc.contributor.authorLoo, Roger
dc.contributor.authorWang, Gang
dc.contributor.authorSouriau, Laurent
dc.contributor.authorLin, Vic
dc.contributor.authorTakeuchi, Shotaro
dc.contributor.authorBrammertz, Guy
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-18T18:30:41Z
dc.date.available2021-10-18T18:30:41Z
dc.date.issued2010
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17529
dc.sourceIIOimport
dc.titleHigh quality Ge virtual substrates on Si wafers with standard STI patterning
dc.typeJournal article
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.source.peerreviewyes
dc.source.beginpageH13
dc.source.endpageH21
dc.source.journalJournal of the Electrochemical Society
dc.source.issue1
dc.source.volume157
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record