Solid phase epitaxy of amorphous Ge films deposited by PECVD

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Authors
Ma, Quanbao; Lieten, Ruben; Degroote, Stefan; Leys, Maarten; Germain, Marianne; Borghs, Gustaaf
Conference
18th International Vacuum Congress - IVC
Title
Solid phase epitaxy of amorphous Ge films deposited by PECVD
Publication type
Meeting abstract
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